Title:
ディスペンサを備えた転写装置、ディスペンサの吐出量検出方法、及びディスペンサの吐出量制御方法
Document Type and Number:
Japanese Patent JP5520612
Kind Code:
B2
Inventors:
Murofushi Isamu
Mitsunori Kokubo
Shigeru Fujiwara
Hiroki Sugiura
Mitsunori Kokubo
Shigeru Fujiwara
Hiroki Sugiura
Application Number:
JP2010000103A
Publication Date:
June 11, 2014
Filing Date:
January 04, 2010
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
B29C59/02; B29C39/02; B29C39/24; H01L21/027
Domestic Patent References:
| JP2007273979A | ||||
| JP2005040690A | ||||
| JP2001327905A | ||||
| JP2005279628A | ||||
| JP2012506635A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu