Title:
移送装置
Document Type and Number:
Japanese Patent JP7322120
Kind Code:
B2
Abstract:
A transport apparatus includes a transport rail extending along a predetermined path, a transport vehicle configured to be movable along the transport rail to transport a material, and a brake unit mounted on the transport vehicle to be adjacent to the transport rail and configured to apply an eddy current braking force to the transport vehicle.
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Inventors:
Chojeik
Cho Kil Hyun
Cho Chun Il
Cho Kil Hyun
Cho Chun Il
Application Number:
JP2021188378A
Publication Date:
August 07, 2023
Filing Date:
November 19, 2021
Export Citation:
Assignee:
SEMES CO., LTD.
International Classes:
H01L21/677; B65G54/02
Domestic Patent References:
JP2020193058A | ||||
JP2020065015A | ||||
JP2010083445A | ||||
JP2015224031A | ||||
JP2002132347A | ||||
JP2002169616A |
Foreign References:
KR1020180136187A | ||||
WO2017158971A1 | ||||
WO2020070795A1 |
Attorney, Agent or Firm:
Atsushi Honda
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