To provide a transfer stage which is so constructed as to have the friction between its driving member and transfer member adjustable and to be applicable to different loads and aging changes in accordance with application patterns and in which an electromechanical transducer having stable driving characteristics is used.
The actuator 10 of a transfer stage 30 is composed of a piezoelectric device 17, a driving shaft 16 fixed to one of the ends of the piezoelectric device 17 and a slider block 18 which is coupled with the driving shaft 16 by friction. The transfer stage 30 is composed of a base 31, the actuator 10 placed on the base 31 and a table 34 which is connected to the slider block 18 with a linking member 35. A pad 19 actuated by a leaf spring 20 is provided on the friction coupling portion between the driving shaft 16 and the slider block 18. The actuating force of the leaf spring 20 is adjusted by turning screws 20a through holes 37 formed in the table 34 to adjust the friction force of the friction coupling portion.
YOSHIDA RYUICHI
ISHIBASHI KENJI
TANIJIRI YASUSHI
OKADA HIROYUKI
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