Title:
並進旋回2自由度ステージ装置およびこれを用いた3自由度ステージ装置
Document Type and Number:
Japanese Patent JP4826584
Kind Code:
B2
More Like This:
| JP2008531321 | Machine Tools |
| WO/2011/147617 | PRODUCTION DEVICE |
Inventors:
Takehiko Komiya
Toshiyuki Osuka
Toshiyuki Osuka
Application Number:
JP2007523400A
Publication Date:
November 30, 2011
Filing Date:
June 19, 2006
Export Citation:
Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
B23Q1/48; B23Q16/02; B23Q17/24; G03F7/20; G12B5/00; H01L21/027
Domestic Patent References:
| JPH04146038A | 1992-05-20 | |||
| JPH11245128A | 1999-09-14 | |||
| JPH11300558A | 1999-11-02 | |||
| JPH10256351A | 1998-09-25 | |||
| JPH02202031A | 1990-08-10 | |||
| JP2002228411A | 2002-08-14 |
Attorney, Agent or Firm:
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa
Hironori Honda
Toshimitsu Ichikawa