Title:
TRANSMISSION FACTOR MEASURING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP3324013
Kind Code:
B2
Abstract:
PURPOSE: To provide a measuring method and a measuring device for a transmission factor in a translucent zone, regarding a such member as a half-tone type phase shift photomask having both of a translucent zone for fine phase shift and a transparent zone.
CONSTITUTION: Two beams having the prescribed coherent wavelength of equal amplitude and phase are respectively transmitted through a fine translucent zone and a transparent zone in the vicinity thereof and, then, made to interfere with each other. Thereafter, coherent light available therefrom is adjusted, thereby obtaining a maximum value Imax and a minimum value Imin for the intensity of the coherent light. Then, a light transmission factor in the translucent zone is expressed as an intensity ratio, using a transmission factor in the transparent zone as reference, based upon both of the maximum and minimum values.
Inventors:
Hiroshi Fujita
Application Number:
JP26774193A
Publication Date:
September 17, 2002
Filing Date:
October 01, 1993
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G01J3/42; G01N21/21; G01N21/59; G03F1/32; G03F1/68; G03F1/84; (IPC1-7): G03F1/08; G01J3/42; G01N21/21; G01N21/59
Domestic Patent References:
| JP4151662A | ||||
| JP4162039A |
Attorney, Agent or Firm:
Satoshi Kanayama
Previous Patent: METHOD OF CONSTRUCTING ARTIFIIAL PERMEABILITY RETARDANT LAYER
Next Patent: LEAD FRAME MATERIAL
Next Patent: LEAD FRAME MATERIAL