Title:
透過率測定装置
Document Type and Number:
Japanese Patent JP4829429
Kind Code:
B2
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Inventors:
Yasuhiro Kishikawa
Seiji Takeuchi
Seiji Takeuchi
Application Number:
JP2001195580A
Publication Date:
December 07, 2011
Filing Date:
June 27, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
G02B5/30; G02B27/28; G03F7/20; H01L21/027
Foreign References:
| US3463575 |
Attorney, Agent or Firm:
Ryosuke Fujimoto