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Title:
TRANSMITTANCE MODULATION TYPE PHOTOMASK AND PRODUCTION OF OPTICAL PARTS BY USING THE SAME
Document Type and Number:
Japanese Patent JPH05257261
Kind Code:
A
Abstract:

PURPOSE: To obtain the transmittance modulation-type photomask which can produce optical parts having bidirectional rugged patterns by exposing once and the process for production of the optical parts by using this photomask.

CONSTITUTION: Apertures 6 and light shielding parts 7 are alternately arranged at prescribed intervals (a), (b) along first and second directions A, B. The width W1 along the first direction A of the light shielding part 7A existing between the apertures 6A and 6A changes along the second direction B in correspondence to the prescribed shape of the ruggedness 16 of a diffraction grating (optical part) 1. The two-dimensional diffraction grating 1 having the rugged patterns in the two directions A, B is produced by one time of exposing when this photomask 5 is used.


Inventors:
Ryuji Watanabe
Shigeki Nakatsu
Application Number:
JP8960992A
Publication Date:
October 08, 1993
Filing Date:
March 11, 1992
Export Citation:
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Assignee:
KURARAY CO.,LTD.
International Classes:
G02B5/18; G02B5/32; G03F1/00; (IPC1-7): G03F1/00; G02B5/18; G02B5/32
Attorney, Agent or Firm:
Shuji Sugimoto