TRANSPARENT CONDUCTING FILM AND MANUFACTURE THEREOF

Title:

TRANSPARENT CONDUCTING FILM AND MANUFACTURE THEREOF

Document Type and Number:

Japanese Patent JPS62287513

Kind Code:

A

Inventors:

IDE YUKIO
ONUMA TERUYUKI
KOJIMA SHIGETO

Application Number:

JP12953986A

Publication Date:

December 14, 1987

Filing Date:

June 04, 1986

Export Citation:

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Assignee:

RICOH KK

International Classes:

C23C16/30; C23C16/22; C23C16/50; C23C16/56; H01B1/08; H01B5/14; H01B13/00; H01L31/18; (IPC1-7): C23C16/30; C23C16/50; H01B5/14; H01B13/00

Attorney, Agent or Firm:

Fumio Usmura

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