PURPOSE: To prevent damage of an insulator substrate as well as to improve the mechanical durability and the like by providing the first transparent conductive layer consisting mainly of a metal oxide laminated on the surface of the insulating substrate, and the second transparent conductive layer including a larger amount of oxygen, consisting of a metal oxide laminated on the surface of the first transparent layer.
CONSTITUTION: The first transparent conductive layer 2 is formed by covering the surface of a high polymer film which consists of polyethylene terephthalate film with indium oxide or the like in the spattering in a vacuum condition. The second transparent conductive layer 3 which consists of mainly indium oxide formed over the surface of the first transparent conductive layer 2 is formed to include the oxygen of the amount more than the first transparent conductive layer 2. Since the layer including more oxygen amount is formed at the surface, the mechanical durability can be improved, and since the heat treatment is not required after the membrane is formed, a transparent conductive membrane not damaging the substrate can be obtained.
OSADA MINORU
YAMAGUCHI HIROSHI
YAMANAKA TAKAYUKI
KOSUGE SHIZUO
