TRANSPARENT CONDUCTIVE SUBSTRATE FOR SOLAR CELL, INCLUDING TRANSPARENT CONDUCTIVE FILM COMPRISING ZINC OXIDE AS MAIN COMPONENT, METHOD FOR PRODUCING THE SAME, AND TARGET USED FOR DEPOSITING THE TRANSPARENT CONDUCTIVE FILM

Title:

Document Type and Number:

Japanese Patent JP2012195405

Kind Code:

A

Abstract:

To provide: a transparent conductive substrate for a solar cell, which has a double texture structure for achieving high photoelectric conversion efficiency and includes a transparent conductive film comprising a zinc oxide as a main component; a method for producing the transparent conductive substrate for a solar cell; and a target used for depositing the transparent conductive film.

A transparent conductive substrate for a solar cell of the present invention includes: a transparent substrate having an irregularity (A) formed on a surface thereof; and a transparent conductive film deposited on the irregularity of the transparent substrate and comprising a zinc oxide as a main component. The transparent conductive film has an irregularity (B) smaller than the irregularity (A), on a surface thereof.

Inventors:

NAKADA KUNIHIKO
NAKAMURA YOSHINOBU
SUZUKI AKIO

Application Number:

JP2011057637A

Publication Date:

October 11, 2012

Filing Date:

March 16, 2011

Export Citation:

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Assignee:

SUMITOMO CHEMICAL CO
OSAKA SANGYO UNIV

International Classes:

H01L31/04; B32B9/00; C03C17/245; C03C23/00; C23C14/08; C23C14/34; H01B5/14

Attorney, Agent or Firm:

深井敏和

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