Title:
TRANSPARENT TYPE SCANNING ELECTRONIC MICROSCOPE
Document Type and Number:
Japanese Patent JPS52130277
Kind Code:
A
Abstract:
PURPOSE: To enable the transparent type scanning electronic microscope, by providing the light shield substance which is constituted so that the light emitting output is partially selected and transparent at the input end surface of the detection means.
Inventors:
TODOKORO HIDEO
Application Number:
JP4657976A
Publication Date:
November 01, 1977
Filing Date:
April 26, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J37/22; H01J37/09; H01J37/26; H01J37/28; (IPC1-7): H01J37/26