Title:
TRANSPORT DEVICE
Document Type and Number:
Japanese Patent JP2015233065
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transport device capable of improving workability.SOLUTION: A transport device that transports a workpiece mounted on an annular frame through a tape stuck to a rear surface of the annular frame includes: a transport arm; a transport head mounted on the transport arm; and moving means that causes the transport head to be moved. The transport head includes: a support member attached to the transport arm; at least a pair of first suction pads that each have a first suction-holding surface for suction-holding a first annular frame mounted on the support member separated by a distance corresponding to a first diameter of the first annular frame having the first diameter; and at least a pair of second suction pads that each have a second suction-holding surface for suction-holding a second annular frame mounted on the support member separated by a distance corresponding to a second diameter of the second annular frame having the second diameter larger than the first diameter, in which the first suction-holding surface is positioned above the second suction-holding surface.
Inventors:
SUZUKI MINORU
Application Number:
JP2014118982A
Publication Date:
December 24, 2015
Filing Date:
June 09, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/677; B25J15/04; B65G49/07
Domestic Patent References:
| JP2007258206A | 2007-10-04 | |||
| JP2007210774A | 2007-08-23 | |||
| JP2007210079A | 2007-08-23 | |||
| JP2012238847A | 2012-12-06 | |||
| JP2001088076A | 2001-04-03 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto
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