PURPOSE: To establish a control method for transporting robot, with which automatic return to the initial position is made when an error has occurred during the motion.

CONSTITUTION: A transporting robot 1 includes a grip 3 to grip a cassette 2 accommodating a wafer to be processed, an arm 4 on which the grip 3 is mounted, and a robot body 5 which works as a frame for the robot. In case an error is generated while the robot 1 is in operation, a robot position monitoring program as a constituent part of a sub-program to be loaded on the robot 1 produces an origin return program which is a means to generate a return to the initial position, and thereby the robot 1 is automatically returned to the initial position.