Title:
搬送式基板処理装置
Document Type and Number:
Japanese Patent JP3622842
Kind Code:
B2
Inventors:
Toshi Shimoda
Hitoshi Tauchi
Hitoshi Tauchi
Application Number:
JP2000375993A
Publication Date:
February 23, 2005
Filing Date:
December 11, 2000
Export Citation:
Assignee:
Sumitomo Precision Products Co., Ltd.
International Classes:
G02F1/13; B05B1/02; B05D1/02; B05D7/00; C23F1/08; H01L21/00; H01L21/027; H01L21/306; (IPC1-7): H01L21/306; C23F1/08
Domestic Patent References:
| JP8236498A | ||||
| JP11016871A | ||||
| JP11145109A | ||||
| JP2000114221A |
Attorney, Agent or Firm:
Takahiko Yanagita
Shoji Yoshida
Shoji Yoshida