Title:
TRANSPORTATION METHOD OF EXTREMELY HIGH PURITY GAS
Document Type and Number:
Japanese Patent JPS5881300
Kind Code:
A
Abstract:
PURPOSE:To prevent the reduction of purity of extremely high purity gas because of the occluded gas in a pipeline by keeping the extremely high purity gas transported in the highly purified pipeline at an extremely low temperature. CONSTITUTION:In an example shown in the figure, liquefied gas in a container 11 is sent to a purifier 12 and the extremely high purity liquefied gas is transported through a highly purified pipeline B and is vaporised by an evaporator 14 on this side of a semiconductor production facility 13 to gasify the extremely high purity liquiefied gas. Since the extremely high purity gas is transported under an extremely low temperature state, the pipeline B is cooled and the molecular motion of the occluded gas in the pipeline B is made remarkably small as compared with that at a normal temperature, thus reducing the possibility that the occluded gas is shifted from inside the body of the pipeline B to the interior of the pipeline and is mixed with the extremely high purity gas. It is desirous that the content of impurities of the gas material to be transported is 1ppm or less and the contant of moisture is 2ppm or less. Incidentally, the gas material to be transported can be either in a liquid state or a gas state.
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Inventors:
YOSHINO AKIRA
Application Number:
JP18006581A
Publication Date:
May 16, 1983
Filing Date:
November 09, 1981
Export Citation:
Assignee:
DAIDO OXYGEN
International Classes:
F17D1/04; F17D1/02; H01L21/02; (IPC1-7): H01L21/02
Domestic Patent References:
| JPS54115412A | 1979-09-08 | |||
| JPS53113391U | 1978-09-09 | |||
| JPS5043953U | 1975-05-02 | |||
| JPS54103777A | 1979-08-15 | |||
| JPS5242151A | 1977-04-01 |
Attorney, Agent or Firm:
Nishihiko Yasuhiko