Title:
TRANSPORTER IN VACUUM
Document Type and Number:
Japanese Patent JPS6195887
Kind Code:
A
Abstract:
The vacuum transfer device comprises a central processing chamber (2) and a plurality of additional chambers (11) in vacuum-tight connection therewith. Inside the central chamber (2) is mounted a rotable coulisse arrangement (21) driven by motors (22,33) located outside the chamber (2) and extendable so as to reach into the additional chambers (11) when correctly aligned. The device serves to transfer objects between manufacturing or measuring work stations without intermediate venting and re-evacuation of the system of chambers.
Inventors:
YOHANESU JIEORUGU BEDONORUTSU
PIEERE REOPORUDO GIYUURETSUTO
HERUMAN EMIIRU NIIBERUGERUTO
HANSU PETERU OTSUTOO
BUORUFUGANKU DEIITERU POORU
DANIERU FUERITSUKUSU UIDOAA
PIEERE REOPORUDO GIYUURETSUTO
HERUMAN EMIIRU NIIBERUGERUTO
HANSU PETERU OTSUTOO
BUORUFUGANKU DEIITERU POORU
DANIERU FUERITSUKUSU UIDOAA
Application Number:
JP12641185A
Publication Date:
May 14, 1986
Filing Date:
June 12, 1985
Export Citation:
Assignee:
IBM
International Classes:
G01R31/26; B25J9/02; C23C14/56; C23F4/00; G12B5/00; H01L21/02; H01L21/677; (IPC1-7): B25J9/04; C23C14/56; C23F1/08; G01R31/26; G12B5/00; H01L21/02
Domestic Patent References:
| JPS55141570A | 1980-11-05 | |||
| JPS57149748A | 1982-09-16 |
Attorney, Agent or Firm:
Fumio Shinoda
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