To make it possible to surely and easily transport a substrate even if the regions for contact with a guide roller are insufficient by pressing the guide roller to the ridge line parts at both end sides of the substrate along the direction of transportation by forming an angle with the substrate plane.

The guide roller 5 comes into contact with the substrate 1 by forming the angle with the substrate 1 at both side ends along the transportation direction of the substrate 1. A roller shaft 52 of the guide roller 5 is freely vertically movably arranged and comes into contact with the ridge line parts 12 of the substrate 1 by self-weight of the guide roller 5. There is, therefore, no need for changing the shape of the guide roller 5 and adjust its position at all even if the width of the substrate 1 increases. The guide roller 5 comes into contact with the substrate 1 under a specified pressure by its self-weight. Then, the execution of the transportation of the substrate 1 is made possible simply by adjusting only the rotating speed of the guide roller 5. Even if the thickness of the substrate 1 change, the transportation in this state is possible.