Title:
TREATING DEVICE
Document Type and Number:
Japanese Patent JPH07169737
Kind Code:
A
Abstract:
PURPOSE: To prevent the electric power feeding section, sealed section, or joint of a mounting table from being damaged by dew condensation.
CONSTITUTION: By providing humidity sensors 30a, 30b, 31a, and 31b near the electric power feeding section 18, sealed section, or joint of a mounting table 4 in which a cooling route is formed from a cooling jacket 8 to an object W to be treated and appropriately detecting dew condensation on them, the deterioration of the section 18 by condensed water or the breakdown of the sealed section or joint by the freezing of condensed water infiltrated into the narrow gaps of the sealed section or joint is prevented.
Inventors:
KOMINO MITSUAKI
DEGUCHI YOICHI
TAGUCHI CHIHIRO
DEGUCHI YOICHI
TAGUCHI CHIHIRO
Application Number:
JP34303793A
Publication Date:
July 04, 1995
Filing Date:
December 14, 1993
Export Citation:
Assignee:
TOKYO ELECTRON LTD
TEL YAMANISHI KK
TEL YAMANISHI KK
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Attorney, Agent or Firm:
Kamei Miaki (1 person outside)