Title:
TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3388706
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make it possible to control the temperature and humidity of atmosphere for treatment units individually and adjust the whole treatment units under the same condition or adjust each treatment unit under different conditions according to the necessary treatment for each treatment unit.
SOLUTION: By using a temperature control unit 81 and a humidity control unit 82, a cleaning gas fed from a common gas feeding source 8 is adjusted for a plurality of coating units in a way that the temperature and moisture content of the gas are made lower than the necessary ones that are controlled by each atmosphere adjusting unit 7 at the application units. The cleaning gas is adjusted again through a heater 73 and a humidifier 74 to a desired temperature and moisture content level in each atmosphere adjusting unit 7, so the cleaning gas with the same temperature and humidity can be fed to a plurality of coating units, and all the atmosphere is adjusted to the same for each coating unit.
Inventors:
Masatoshi Kaneda
Norio Chiba
Yoshio Kimura
Masami Nakumoto
Yasuhiro Sakamoto
Nobuyuki Jinnai
Norio Chiba
Yoshio Kimura
Masami Nakumoto
Yasuhiro Sakamoto
Nobuyuki Jinnai
Application Number:
JP33849998A
Publication Date:
March 24, 2003
Filing Date:
November 12, 1998
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP10214761A | ||||
| JP6310417A | ||||
| JP7221162A | ||||
| JP10208997A | ||||
| JP10261558A | ||||
| JP7211630A | ||||
| JP9148294A |
Attorney, Agent or Firm:
Toshio Inoue (1 outside)
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