To provide a treatment object introduction device capable of replenishing a treatment object into the treatment object introduction device without disturbing a special atmosphere in a treatment device.
This treatment object introduction device for introducing a treatment object in an airtight state from the outside into a treatment device F1 which treats the treatment object in the airtight state includes: a treatment object storage part 11 having an openable/closable storage port 111c which can temporarily store the treatment object and is used when the treatment object is stored; a treatment object passage 12 through which the treatment object which is introduced into the inside of the treatment device F1 can pass in the airtight state; and a transport part 1b having a treatment object extraction mechanism 13 capable of extracting the treatment object in the air tight state from the treatment object storage part 11 to the treatment object passage 12. The transport part 1b is provided with: a closing part 14 capable of airtightly blocking the treatment device side and the treatment object storage part side of the transport part 1b; and a joint part 15 capable of separating and joining the transport part 1b at a position closer to the treatment object storage part side than the closing part 14 out of the transport part 1b.
YADA TAKASHI
MIYATA EIKO
HANEDA NORIYUKI
OIKAWA SHIGERU
KOKETSU AKIRA
NAKANO KATSUHIKO
KAWAI MITSUO
OCHI AKIFUMI
| JPS63194296U | 1988-12-14 |
Seiichi Yakumaru
Akira Kitada