Title:
トリス(ジイソブチリルメタナート)ネオジムおよびそれを用いた化学気相成長法によるネオジム置換チタン酸ビスマス強誘電体薄膜の製造方法
Document Type and Number:
Japanese Patent JP4042959
Kind Code:
B2
More Like This:
Inventors:
Yukie Okuhara
Hideko Kadokura
Hideko Kadokura
Application Number:
JP2002163569A
Publication Date:
February 06, 2008
Filing Date:
April 26, 2002
Export Citation:
Assignee:
High purity chemical research institute
International Classes:
C07C49/92; C07C45/77; C07F5/00; C23C16/18; H01L21/316
Domestic Patent References:
| JP9228049A | ||||
| JP4072066A | ||||
| JP4074866A | ||||
| JP2002212129A | ||||
| JP4275251A | ||||
| JP2003321475A | ||||
| JP9027601A | ||||
| JP2002533910A | ||||
| JP2002121675A | ||||
| JP2002087819A |
Other References:
Primenenie Konformatsion. Analiza V Sinteze Novykh Organ. Veshchestv (1975) 144-51
Attorney, Agent or Firm:
Kinoshita Shigeru
Rie Ishimura
Rie Ishimura