Title:
シリコンウエーハ挟持用ピンセット
Document Type and Number:
Japanese Patent JP4131112
Kind Code:
B2
Inventors:
Kotaro Shimizu
Hideaki Kanehara
Hideaki Kanehara
Application Number:
JP2002057635A
Publication Date:
August 13, 2008
Filing Date:
March 04, 2002
Export Citation:
Assignee:
Sumco inc.
International Classes:
B25B9/02; H01L21/677; B65G49/07; H01L21/68
Domestic Patent References:
| JP62116539U | ||||
| JP8330382A | ||||
| JP2031666U | ||||
| JP49072163U |
Attorney, Agent or Firm:
Masayoshi Suda