Title:
TWO-LUMINOUS-FLUX INTERFEROMETER
Document Type and Number:
Japanese Patent JPH0377029
Kind Code:
A
Abstract:
PURPOSE:To expand a measurement range with a single beam splitter by providing a corner cube type movable reverse reflector and a fixed plane mirror with a reflection angle adjusting means opposite to the top and reverse surface of the beam splitter. CONSTITUTION:The beam splitter 4 has plate thickness larger than the optical path difference of the interferometer and is a parallel flat plate which is made of a light-transmissive semiconductor such as silicon or single dielectric material such as zinc selenium. The corner cube type movable reverse reflector 20 and the fixed plane mirror 10 with a swing and tilt device 21 as the reflection angle adjusting means are provided opposite to the top and reverse surfaces of the beam splitter 4. Incident light is split by one surface of the beam splitter 4 into two pieces of luminous flux, which are reflected by the reflector 20 and plane mirror 10 respectively to interfere with each other on the opposite surface while having such an optical path difference that light beams are all equal in the wavelength in a spectral range. Therefore, a translucent film and a correcting plate that the beam splitter requires before are not necessary and an infrared-light transmissive material such as silicon is used to greatly expands the measurement range wherein the same beam splitter is usable.
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Inventors:
IZUMI AKIO
Application Number:
JP21439989A
Publication Date:
April 02, 1991
Filing Date:
August 21, 1989
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
G01B9/02; G01J3/45; (IPC1-7): G01B9/02; G01J3/45
Attorney, Agent or Firm:
Iwao Yamaguchi
Next Patent: JPH0377030