Title:
マイクロリソグラフィ用の紫外線偏光ビームスプリッタ
Document Type and Number:
Japanese Patent JP2004515796
Kind Code:
A
Abstract:
A beamsplitter includes a first fluoride prism and a second fluoride prism. A coating interface is between the first and second fluoride prisms, wherein an overall R(s)*T(p) function of the beamsplitter varies no more than ±2.74% in the range of 40-50 degrees of incidence.
Inventors:
McCrea, James A.
Will Crow, Ronald A.
Gregory, matthew
Will Crow, Ronald A.
Gregory, matthew
Application Number:
JP2001562246A
Publication Date:
May 27, 2004
Filing Date:
March 31, 2000
Export Citation:
Assignee:
Yes ML US, Inc.
International Classes:
G02B5/04; G02B1/02; G02B5/28; G02B5/30; G02B27/28; G03F7/20; H01L21/027; (IPC1-7): G02B5/30; G02B5/04; G02B5/28; G02B27/28; G03F7/20; H01L21/027
Domestic Patent References:
| JPH095518A | 1997-01-10 | |||
| JPH0948633A | 1997-02-18 | |||
| JPH10221596A | 1998-08-21 | |||
| JPH09246179A | 1997-09-19 | |||
| JPH1048526A | 1998-02-20 | |||
| JPH1164630A | 1999-03-05 |
Foreign References:
| WO2000008496A1 | 2000-02-17 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita