ULTRA-BROADBAND UV MICROSCOPE IMAGING SYSTEM WITH WIDE RANGE ZOOM CAPABILITY

Japanese Patent JP2015018279

A

PROBLEM TO BE SOLVED: To provide an ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with a wide-range zoom capability.SOLUTION: A microscope system, which comprises a catadioptric lens group and a zooming tube lens group 139, has high optical resolution in a deep UV wavelength, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify a system manufacturing process. By combining with an all-refractive zooming tube lens, excellent image quality across a very broad deep ultraviolet spectral range can be obtained, The zooming tube lens is modified to compensate for higher-order chromatic aberrations that normally limit performance.

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SHAFER DAVID ROSS
CHUANG YUNG-HO
TSAI BIN-MING BENJAMIN

JP2014196625A

January 29, 2015

September 26, 2014

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KLA TENCOR CORP

G01N21/33; G02B13/14; G02B17/08; G02B15/14; G02B15/15; G02B15/16; G02B21/00; G02B21/02; G02B21/04; G02B21/16; G03C5/16; G03F1/84; G03F3/00; G03F7/20; H04N5/225

JPH03287147A	1991-12-17
JPS60156030A	1985-08-16

US4971428A	1990-11-20
US5488229A	1996-01-30
US5031976A	1991-07-16

Patent business corporation Akinari international patent firm

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