Title:
ウルトラファインバブル生成装置およびウルトラファインバブル生成方法
Document Type and Number:
Japanese Patent JP7317521
Kind Code:
B2
Abstract:
Provided is an ultrafine bubble generating apparatus and an ultrafine bubble generating method capable of efficiently generating UFBs with high purity. To this end, a chamber is formed by providing a wall, a lid substrate, and an electrode pad on an element substrate in a form of a wafer.
Inventors:
Teruo Ozaki
Masahiko Kubota
Akiki Yamada
Yoshiyuki Imanaka
Yumi Yanagiuchi
Hiroshi Arimizu
Hiroyuki Ishinaga
Masahiko Kubota
Akiki Yamada
Yoshiyuki Imanaka
Yumi Yanagiuchi
Hiroshi Arimizu
Hiroyuki Ishinaga
Application Number:
JP2019036186A
Publication Date:
July 31, 2023
Filing Date:
February 28, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
B01F23/2375; B01F35/90
Domestic Patent References:
| JP2004069499A | ||||
| JP2001058411A | ||||
| JP2000189946A |
Foreign References:
| US20010055242 | ||||
| US20170095779 |
Attorney, Agent or Firm:
Patent Attorney Tani / Abe Patent Office
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