Title:
超高精度供給装置
Document Type and Number:
Japanese Patent JP3992681
Kind Code:
B2
Abstract:
Provided is an ultra-precision feeding apparatus. The feeding apparatus comprises an actuator horizontally positioned between a base and a motion stage movably provided to the top of the base, first hinge member which is fixed to the base and one end of the actuator, second hinge member which is fixed to the other end of the actuator, third hinge member with two hinges which is fixed to the motion stage, and a lever member with a notch hinge which is fixed to the base and cooperates with the second hinge member and the third hinge member.
Inventors:
Heui Jae Pahk
Zombie
Zombie
Application Number:
JP2003503396A
Publication Date:
October 17, 2007
Filing Date:
August 06, 2001
Export Citation:
Assignee:
Heui Jae Pahk
International Classes:
B23Q5/28; B23Q15/00; B23Q1/34; B23Q1/48; B23Q1/54; B23Q1/62; B23Q16/00
Domestic Patent References:
| JP2040593A | ||||
| JP63193089A |
Attorney, Agent or Firm:
Akihiro Ryuka