To provide a ultra high temperature and ultra high speed uniformly heating device for giving high speed temperature rise to a whole heated object up to a ultra high temperature region in a short time and holding the heated object at a uniform temperature.

The heated object 8 provided in a vacuum chamber 7 is irradiated with an infrared ray by using two infrared radiation heaters A, B provided in the opposite direction for giving temperature rise to the heated object 8 up to a higher temperature than room temperature. A high frequency induction heating coil 18 is provided on the outer periphery of the heated object 8 for supplying a high frequency to the heated object 8 which attains a high temperature at a ultra high speed with the infrared radiation heat. Thus, ultra high speed temperature rise up to a ultra high temperature region and uniform temperature distribution are achieved.