Title:
ホウ素超高純度除去型超純水製造装置及びホウ素超高純度除去超純水の製造方法
Document Type and Number:
Japanese Patent JP7192519
Kind Code:
B2
Abstract:
To provide an ultrapure boron removal type ultrapure water production apparatus that can be used for blank water for ultrapure water analysis.SOLUTION: An ultrapure boron removal type ultrapure water production apparatus 1 includes in an ultrapure water production system 1A: an electrodeionization device 21 and an ion exchange resin column 22 which is comprised of H type cation exchange resin. The ultrapure water production system 1A is comprised of a pretreatment system 2, a primary pure water system 3 and a subsystem (secondary pure water system) 4. The primary pure water system 3 includes a tank 5 for pretreated water W1, a pump 6, an ultraviolet (UV) oxidizer 7, a regenerative ion exchanger 8 and a membrane degassing device 9. The subsystem 4 is comprised of a sub tank 11, an ultraviolet oxidation device 12, a platinum group metal catalyst resin tower 13, a membrane type deaerator 14, a non-regenerative mixed bed ion exchanger 15 and an ultrafiltration (UF) membrane 16.SELECTED DRAWING: Figure 1
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Inventors:
Shin Sato
Application Number:
JP2019008582A
Publication Date:
December 20, 2022
Filing Date:
January 22, 2019
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
C02F1/44; B01D61/44; B01D61/48; B01D61/54; B01J23/40; B01J39/04; B01J49/09; C02F1/20; C02F1/32; C02F1/42; C02F1/469; C02F9/02; C02F9/06
Domestic Patent References:
| JP2017131846A | ||||
| JP2015020131A | ||||
| JP6055171A | ||||
| JP2012196591A |
Foreign References:
| WO2009060827A1 |
Attorney, Agent or Firm:
Yuji Hayakawa
Keisuke Murasame
Keisuke Murasame