To provide an ultrapure water producing apparatus and an ultrapure water producing method reduced in consumption amounts of energy and chemicals, and producing ultrapure water having superior cleaning capacity.
The ultrapure water producing apparatus is provided with a pretreatment device 17 receiving raw water, a primary pure water producing apparatus 18, and a secondary pure water producing apparatus 19 receiving primary pure water from the primary pure water producing apparatus 18 and having a nanobubble generator 14. Nitrogen gas is introduced into the nanobubble generator 14, and nitrate ions and nanobubbles can be included in the primary pure water introduced into the second pure water producing apparatus 19. Thus, ultrapure water containing nitrate ions and nanobubbles can be provided from the second pure water producing apparatus 19. The ultrapure water containing nitrate ions and nanobubbles is supplied to respective use points 13.
NAKAJO KAZUMI
KATAOKA MASANORI
IMAZU SHIRO
Mitsuo Tanaka
Yukinori Nakakura