To provide an ultrasonic cleaning apparatus which can quickly clean a plate-shaped object with a small amount of cleaning liquid and reduced power.
The plate frame 54 of a plate 53 is suspended from a plate suspending hook 47. An oscillating plate 43 fitted with an ultrasonic oscillator 41 is suspended from a suspending hook 39 and made to approach one side of the plate 53 parallel with it or come into contact with it slightly by its lower part. A reflection plate 59 suspended similarly from the lower end of a cleaning liquid pipe holder 57 is also made to approach the other side of the plate 53 parallel with it or come into contact with it slightly by its lower part. Cleaning liquid is introduced from the pores of a cleaning liquid pipe 63 into the clearance between the plate 53 and the reflection plate 50. By oscillating the oscillator 41, cleaning liquid films are formed on both sides of the plate 53, and ultrasonic cleaning is carried out through the films.
DENTO AKIO
TANO MAMORU
SAWAIRI KIYOSHI
