Title:
ULTRASONIC MOTOR FOR VACUUM ENVIRONMENT
Document Type and Number:
Japanese Patent JP3447002
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrasonic motor for a vacuum environment which can drive a driven object in a vacuum environment, while dimensional increase and complication of an apparatus are avoided and the contamination of the vacuum atmosphere caused by gas produced from a piezoelectric device is avoided.
SOLUTION: A transmission medium 4 is made to penetrate a partition wall 100 which separates a vacuum environment from a non-vacuum environment, and ultrasonic vibration from an ultrasonic vibrator 2 in the non-vacuum environment is transmitted to a driven object 3 in the vacuum environment via the transmission medium 4. The ultrasonic vibrator 2 is attached detachably to the non-vacuum environment side end of the transmission medium 4. The transmission medium 4 is a road-shaped metal block, and a position at which the transmission medium 4 is fixed to the partition wall 100 coincides with the position of the transmission medium 4, at which the amplitude of the ultrasonic vibration is minimized. Further, the transmission medium 4 is constructed so as to excite a vibration mode of 3rd order or higher.
Inventors:
Toshiki Niino
Go Morita
Hideo Tashiro
Go Morita
Hideo Tashiro
Application Number:
JP2000011861A
Publication Date:
September 16, 2003
Filing Date:
January 20, 2000
Export Citation:
Assignee:
RIKEN
International Classes:
B25J19/00; B01J3/00; G05D3/00; H02N2/00; (IPC1-7): H02N2/00; B01J3/00; B25J19/00
Domestic Patent References:
| JP10225152A | ||||
| JP9247967A | ||||
| JP10174469A | ||||
| JP7107761A | ||||
| JP270277A | ||||
| JP61167437A | ||||
| JP9219350A |
Attorney, Agent or Firm:
Hitoshi Suzuki
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