Title:
超音波センサー及びその製造方法
Document Type and Number:
Japanese Patent JP6536792
Kind Code:
B2
Abstract:
An ultrasonic sensor includes: when two orthogonal axes are referred to as an X axis and a Y axis and a plane formed by the X axis and the Y axis is referred to as an XY plane, a substrate disposed across the XY plane; a plurality of spaces formed in the substrate in at least one direction of an X-axis direction and a Y-axis direction; a vibrating plate that is provided on the substrate such that the spaces are closed and that has a first surface on the substrate side and a second surface facing the first surface; and a piezoelectric element that is provided at a portion on the second surface side of the vibrating plate that corresponds to the space, and that transmits/receives an ultrasonic wave. At least some of the spaces are arranged to form a zigzag shape.
Inventors:
Koji Ohashi
Application Number:
JP2015063324A
Publication Date:
July 03, 2019
Filing Date:
March 25, 2015
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H04R17/00; A61B8/14; H01L41/047; H01L41/09; H01L41/113; H04R31/00
Domestic Patent References:
| JP2013211604A | ||||
| JP11056857A | ||||
| JP2014161707A | ||||
| JP2013208148A | ||||
| JP2013255692A | ||||
| JP2012200364A |
Attorney, Agent or Firm:
Hiroyuki Kurihara