Title:
超音波トランスデューサ素子、及び超音波撮像装置
Document Type and Number:
Japanese Patent JP6636516
Kind Code:
B2
Abstract:
An ultrasonic transducer element is configured by a substrate, a lower electrode which is formed on a first principal surface of the substrate, a first insulating film which is formed on the lower electrode, a first cavity layer which is formed on the first insulating film, a second insulating film which is formed on the first cavity layer, an upper electrode which is formed on the second insulating film and disposed at a position overlapping with the first cavity layer when viewed from an upper surface, a third insulating film which is formed on the upper electrode, a second cavity layer which is formed on the third insulating film, a fourth insulating film which is formed on the second cavity layer, a fixing portion which is formed by the second to fourth insulating films surrounding an outer periphery of the first cavity layer when viewed from the upper surface of the first principal surface of the substrate, a movable portion which is a region inside the second cavity layer in a membrane which is formed by the second to fourth insulating films formed on the first cavity layer and the upper electrode, a first connection portion and a second connection portion which is stacked with a gap with the first connection portion, the connection portions being configured by the second to fourth insulating films connecting the movable portion and the fixing portion.
Inventors:
Hiroaki Hasegawa
Taiichi Takezaki
Shuntaro Machida
Daisuke Tatsuzaki
Taiichi Takezaki
Shuntaro Machida
Daisuke Tatsuzaki
Application Number:
JP2017521459A
Publication Date:
January 29, 2020
Filing Date:
June 04, 2015
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H04R19/00; A61B8/14; G01N29/04; G01N29/24; H04R31/00
Domestic Patent References:
| JP2009182838A | ||||
| JP2011507561A |
Foreign References:
| WO2007046180A1 | ||||
| WO2014103334A1 |
Attorney, Agent or Firm:
Aoritsu patent business corporation