Title:
Ultrasonic transducer, its manufacturing method, and ultrasonic probe using the same
Document Type and Number:
Japanese Patent JP5851238
Kind Code:
B6
Abstract:
Disclosed is an ultrasonic transducer that is provided with: a bottom electrode; an electric connection part which is connected to the bottom electrode from the bottom of the bottom electrode; a first insulating film which is formed so as to cover the bottom electrode; a cavity which is formed on the first insulating film so as to overlap the bottom electrode when seen from above; a second insulating film which is formed so as to cover the cavity; and a top electrode which is formed on the second insulating film so as to overlap the cavity when seen from above. The electric connection part to the bottom electrode is positioned so as to not overlap the cavity when seen from above.
Application Number:
JP2011502625A
Publication Date:
December 15, 2023
Filing Date:
February 23, 2010
Export Citation:
International Classes:
H04R19/00; B81B3/00; B81C1/00; H01L29/84; H04R31/00