Title:
超音波トランスデューサ、その製造方法および超音波撮像装置
Document Type and Number:
Japanese Patent JP7224190
Kind Code:
B2
Abstract:
An object of the present invention is to provide an ultrasonic transducer having a high sensitivity and a high durability. An ultrasonic transducer includes: a pair of upper and lower electrodes; a cavity layer having a vibration space directly sandwiched between the pair of electrodes; and an insulating layer sandwiched between the pair of electrodes and disposed around the vibration space. A vertical thickness of the insulating layer is greater than that of the cavity layer.
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Inventors:
Masakazu Kono
Taiichi Takezaki
Shuntaro Machida
Daisuke Tatsuzaki
Taiichi Takezaki
Shuntaro Machida
Daisuke Tatsuzaki
Application Number:
JP2019004613A
Publication Date:
February 17, 2023
Filing Date:
January 15, 2019
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H04R19/00; A61B8/14; H04R31/00
Domestic Patent References:
JP2008098697A | ||||
JP2003500955A | ||||
JP2013165753A |
Foreign References:
WO2015159427A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Sannozaka Patent Office