Title:
超音波振動接合装置
Document Type and Number:
Japanese Patent JP4884936
Kind Code:
B2
Inventors:
Tohru Nehashi
Masayasu Torai
Masayasu Torai
Application Number:
JP2006313945A
Publication Date:
February 29, 2012
Filing Date:
November 21, 2006
Export Citation:
Assignee:
Athlete fa corporation
esb corporation
Shibaura Mechatronics Co., Ltd.
esb corporation
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/607; B06B1/02
Domestic Patent References:
| JP2003282644A | ||||
| JP2002118152A | ||||
| JP2005347507A |
Attorney, Agent or Firm:
Iat International Patent Business Corporation