PURPOSE: To support a stator and a moving element by small-sized supports without loss of vibrating characteristic of an elastic element and driving characteristics of the moving element, and to reduce in size them by supporting flanges provided at the stator and the moving element by a support of a material having low longitudinal elastic coefficient.
CONSTITUTION: In a stator 1, a piezoelectric element 12 is integrally adhered to an elastic element 11 made of phosphorus bronze, stainless steel, Invar, etc., and an annular flange 11a is integrally molded in the vicinity of the central plane of the inner periphery of the element 11. Supports 3, 4 respectively support the stator 1 and a moving element 2, and in contact with the inner peripheral surfaces of flanges 11a, 21a of the element 11 and the a moving element base material 21 to be supported axially. The supports 3, 4 are formed of materials having small longitudinal elastic coefficient. Accordingly, the diameters of the elements 11, 2 can be formed substantially in the same diameters as those of the supports 3, 4. Thus, the vibrating characteristic of the element 11 and the driving efficiency of the moving element can be improved, and the entirety can be reduced in size.
TAKAGI TADAO