Title:
光透過領域を有する研磨パッドを製造するための超音波溶接法
Document Type and Number:
Japanese Patent JP4908207
Kind Code:
B2
Abstract:
A method of forming a chemical-mechanical polishing pad having at least one optically transmissive region comprising (i) providing a polishing pad comprising an aperture, (ii) inserting an optically transmissive window into the aperture of the polishing pad, and (iii) bonding the optically transmissive window to the polishing pad by ultrasonic welding.
Inventors:
Newell, Kelly Jay.
Application Number:
JP2006517168A
Publication Date:
April 04, 2012
Filing Date:
June 03, 2004
Export Citation:
Assignee:
CABOT MICROELECTRONICS CORPORATION
International Classes:
B24B37/013; B24B37/20; B24D7/12; B24D18/00; B29C65/08; H01L21/304
Domestic Patent References:
| JP2004105924A |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Masaharu Konoue
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Masaharu Konoue