To provide an ultrathin film manufacturing apparatus capable of producing a ultrathin film high in thickness precision in large quantities.
The ultrathin film manufacturing apparatus 1 is equipped with a container 2 for storing a liquid, a supply means 3 for supplying a ultrathin film raw material into the container 2, a film compression means 4 for compressing the water surface film developed on the liquid surface of the container 2 by the supply means 3 to form a ultrathin film F and a film forming means 6 for transferring the ultrathin film F formed by the film compression means 4 to a substrate 5 moving in the direction crossing the liquid surface, and also equipped with a surface pressure measuring means for measuring the surface pressure of the water surface film formed on the liquid surface. The film compression means 4 has a plurality of compression members 21a and 21b for moving while coming into contact with the liquid surface to compress the water surface film formed on the liquid surface and a drive part for individually driving a plurality of the compression members 21a and 21b and a plurality of the compression members 21a and 21b are successively driven toward a substrate direction and individually controlled in driving on the basis of the output of the surface pressure measuring means 24.
NIIMA SATOSHI
HORI NOBUYUKI
SEKI TAKAHIRO
NAGANO SHUSAKU
Kunio Ueda