Title:
ULTRAVIOLET CURING TYPE RESIN COMPOSITION
Document Type and Number:
Japanese Patent JP2649621
Kind Code:
B2
Abstract:
PURPOSE: To provide a low-viscosity resin composition easily cured by irradiation with active energy rays and soluble and peelable by alkali, and especially, to provide the ultraviolet curing type resin composition superior as a resin composition used for an etching resist.
CONSTITUTION: This ultraviolet curing type resin composition is characterized by comprising a compound having one carboxylic group and one acryloyl or methacryloyl group in one molecule; a compound having ≥2 acryloyl or methacryloyl group in one molecule; a leveling agent; and a tertiary amine photoinitiator and/or a thioxantone type photoinitiator, and having a viscosity of ≤5000cps at 25°C.
Inventors:
IGARASHI ICHIRO
SASAKI YUTAKA
JITSUMATSU TETSUJI
OOTA HIROYUKI
SATO MASANOBU
NISHIMUTA HIROSHI
SASAKI YUTAKA
JITSUMATSU TETSUJI
OOTA HIROYUKI
SATO MASANOBU
NISHIMUTA HIROSHI
Application Number:
JP28402191A
Publication Date:
September 03, 1997
Filing Date:
October 04, 1991
Export Citation:
Assignee:
TOA GOSEI KK
DAINIPPON SUKURIIN SEIZO KK
DAINIPPON SUKURIIN SEIZO KK
International Classes:
C09D4/02; C08F2/44; C08F2/50; C08F20/10; C08F20/26; C08F220/26; C08F220/28; C09D4/00; C09D5/00; C09D7/12; C09D7/47; G03F7/004; G03F7/027; G03F7/028; H01L21/027; H01L21/30; (IPC1-7): G03F7/027; C08F2/44; C08F2/50; C08F220/26; C08F220/28; C09D4/02; C09D5/00; C09D7/06; G03F7/004; G03F7/028
Domestic Patent References:
| JP1261410A | ||||
| JP324168A | ||||
| JP5799636A | ||||
| JP62288667A | ||||
| JP1261410A | ||||
| JP2110166A | ||||
| JP2133404A | ||||
| JP598112A |