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Title:
ULTRAVIOLET SYSTEMS AND METHODS FOR IRRADIATING A SUBSTRATE
Document Type and Number:
Japanese Patent JP2021002526
Kind Code:
A
Abstract:
To provide a UV system and a method to improve fields such as power efficiency, output, versatility, and lives of components.SOLUTION: A UV system (10) for irradiating a substrate (26) includes a lamphead (16) having an enclosure with an interior. A UV bulb (24) is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system (10) also includes a solid state RF source (12) capable of generating the RF energy. The RF energy is transmitted to the UV bulb (24), which causes the UV bulb (24) to ignite and emit the UV energy from the interior of the lamphead (16).SELECTED DRAWING: Figure 1

Inventors:
JAMES M BORSUK
GREGORY W HARRELL
JAMES M KHOURY
EDWARD C MCGHEE
JAMES C SMITH
HALLIE SMITH-PETEE
Application Number:
JP2020156986A
Publication Date:
January 07, 2021
Filing Date:
September 18, 2020
Export Citation:
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Assignee:
NORDSON CORP
International Classes:
H01J65/04; H01J7/24; H01J7/44; H01J61/52
Domestic Patent References:
JPH0741963U1995-07-21
JPS61118958A1986-06-06
JP2011045835A2011-03-10
JP2011505060A2011-02-17
JP2013140788A2013-07-18
JPS62172657A1987-07-29
Attorney, Agent or Firm:
Shinichiro Tanaka
▲吉▼田 和彦
Mitsuru Matsushita
Ichiro Kurasawa
Yasushi Yamamoto
Katsuomi Isogai