Title:
単一指向性MEMSマイクロホン
Document Type and Number:
Japanese Patent JP6580356
Kind Code:
B2
Inventors:
Shota Kikuchi
Application Number:
JP2015062857A
Publication Date:
September 25, 2019
Filing Date:
March 25, 2015
Export Citation:
Assignee:
Primo Co., Ltd.
International Classes:
H04R19/04; B81B7/02; H01L29/84; H04R1/38; H04R31/00
Domestic Patent References:
JP2009055082A | ||||
JP2005295278A | ||||
JP2010136131A | ||||
JP2010104006A |
Foreign References:
WO2009034786A1 |
Attorney, Agent or Firm:
Tsutsui International Patent Office
Shizuyo Tamamura
Shizuyo Tamamura