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Title:
UNIFORM APPLICATION OF RESIST
Document Type and Number:
Japanese Patent JPH031525
Kind Code:
A
Abstract:

PURPOSE: To make the swell of a resist occur so as to obtain a board to which resist is applied uniformly by arranging dummies of the same thickness as the board without space around the board and spin-coating them.

CONSTITUTION: A rectangular board 2 is placed on a spinner 1, and around its circumference, dummies 3, 4, 5 and 6, consisting of glass boards of the same thickness as the board 2, being prepared in advance are arranged without space, respectively, and then the board 2 and the dummies 3, 4, 5 and 6 are fixed to the spinner 1 by a vacuum chuck. Next, while rotating the spinner 1 at specified rotation speed by a specified time, resist solution is dropped onto the board 2 so as to do spin-coating of the resist. After finish of the spin- coating, the board 2 and the dummies 3, 4, 5 and 6 are separated. Since the board is spin-coated with upper resist after the dummies of the same thickness as the board are arranged without space around the board fixed onto the spinner, the swell of the resist at the board margin shifts to the dummy margins, and the resist thickness of the board becomes uniform.


Inventors:
KAMAIKE MAKOTO
Application Number:
JP13489889A
Publication Date:
January 08, 1991
Filing Date:
May 29, 1989
Export Citation:
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Assignee:
KOMATSU MFG CO LTD
International Classes:
G03F7/16; B05D1/40; H01L21/027; (IPC1-7): B05D1/40; G03F7/16; H01L21/027



 
Next Patent: JPH031526