Title:
UNMANNED CARRIER VEHICLE FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JP3861534
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent entrance of dust to the cargo chamber of an unmanned carrier for clean room during running.
SOLUTION: An unmanned carrier 100 for a clean room having a cargo chamber 103 loaded on a running track 102 is progressed in a direction A. The work W is carried through right and left entrance windows 106. High- efficient particle removing filters 113 and 114 are arranged in ducts 110 and 111 for an air curtain. Air generated by running is purified by the filters and flows through the ducts and supplied through air outlets 110b and 111b. Thereby, an air curtain AC is formed, the entrance part 106 is closed, and entrance of dust in a cargo window 103 is prevented from occurring.
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Inventors:
Nimura Takashi
Application Number:
JP33113299A
Publication Date:
December 20, 2006
Filing Date:
November 22, 1999
Export Citation:
Assignee:
KABUSHIKI KAISHA MEIDENSHA
International Classes:
B65G1/00; F24F9/00; (IPC1-7): F24F9/00; B65G1/00
Domestic Patent References:
| JP11331132A |
Attorney, Agent or Firm:
Toshiro Mitsuishi
Tadahiro Mitsuishi
Yasuyuki Tanaka
Tadahiro Mitsuishi
Yasuyuki Tanaka