Title:
UPPER ELECTRODE ASSEMBLY AND PLASMA PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2023053918
Kind Code:
A
Abstract:
To obtain stable electric conduction between a first member and a second member that an upper electrode assembly has.SOLUTION: There is provided an upper electrode assembly of a plasma processing apparatus, and the upper electrode assembly comprises a first member formed of conductive material, a second member formed of conductive material and provided on the first member, and a conductive member interposed between the first member and second member and letting the first member and second member electrically conduct to each other, wherein the conductive member contains nickel, chromium and molybdenum and also has its surface processed.SELECTED DRAWING: Figure 1
Inventors:
KATO TOMOYA
LI CHAO
LI CHAO
Application Number:
JP2022155478A
Publication Date:
April 13, 2023
Filing Date:
September 28, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H05H1/46
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito