Title:
少なくとも１種類の１５族元素二元化合物の使用法、ＩＩＩ−Ｖ族半導体層、及び１５族元素二元化合物
Document Type and Number:
Japanese Patent JP6695883
Kind Code:
B2
Abstract:
The invention provides the use of at least one binary group 15 element compound of the general formula R1R2E-E′R3R4 (I) or R5E(E′R6R7)2 (II) as the educt in a vapor deposition process. In this case, R1, R2, R3 and R4 are independently selected from the group consisting of H, an alkyl radical (C1-C10) and an aryl group, and E and E′ are independently selected from the group consisting of N, P, As, Sb and Bi. This use excludes hydrazine and its derivatives. The binary group 15 element compounds according to the invention allow the realization of a reproducible production and/or deposition of multinary, homogeneous and ultrapure 13/15 semiconductors of a defined combination at relatively low process temperatures. This makes it possible to completely waive the use of an organically substituted nitrogen compound such as 1.1 dimethyl hydrazine as the nitrogen source, which drastically reduces nitrogen contaminations—compared to the 13/15 semiconductors and/or 13/15 semiconductor layers produced with the known production methods.
Inventors:
Karsten von Haenish
Kerstin Forts
Wolfgang Storz
Eduard Stelzer
Andreas Buyer
Dominic Kuiper
Benjamin Ringler
Kerstin Forts
Wolfgang Storz
Eduard Stelzer
Andreas Buyer
Dominic Kuiper
Benjamin Ringler
Application Number:
JP2017535963A
Publication Date:
May 20, 2020
Filing Date:
September 25, 2015
Export Citation:
Assignee:
Phillips-Universitate Marburg
International Classes:
H01L21/205; C07F9/46; C07F9/72; C07F9/90; C23C16/18; H01L21/20
Domestic Patent References:
| JP5121340A | ||||
| JP4215421A | ||||
| JP2000082673A | ||||
| JP2010514918A |
Foreign References:
| US6060119 |
Other References:
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O. J. SCHERER und W. JANSSEN,ELEMENTORGANISCHE AMIN/IMIN-VERBINDUNGEN VII UBERFUHRUNG EINES N-SILYLIERTEN AMINOARSINS IN EIN N-SILYL-ARSINIMIN,JOURNAL OF ORGANOMETALLIC CHEMISTRY,1969年,Vol. 16,pp. 69-70
OTTO J. SCHERER und GERD SCHIEDER,METALLORGANISCHE AMINOPHOSPHINE UND PHOSPHINIMINE,CHEMISCHE BERICHTE,1968年,VOL. 101,pp. 4184 - 4198
O. J. SCHERER und W. JANSSEN,ELEMENTORGANISCHE AMIN/IMIN-VERBINDUNGEN VII UBERFUHRUNG EINES N-SILYLIERTEN AMINOARSINS IN EIN N-SILYL-ARSINIMIN,JOURNAL OF ORGANOMETALLIC CHEMISTRY,1969年,Vol. 16,pp. 69-70
OTTO J. SCHERER und GERD SCHIEDER,METALLORGANISCHE AMINOPHOSPHINE UND PHOSPHINIMINE,CHEMISCHE BERICHTE,1968年,VOL. 101,pp. 4184 - 4198
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe
Shinya Mitsuhiro
Tatsuhiko Abe