Title:
金属（ＩＶ）テトラ−アミジネート化合物ならびに蒸着においての使用
Document Type and Number:
Japanese Patent JP5555872
Kind Code:
B2
Abstract:
Metal(IV) tetrakis(N,N'-dialkylamidinates) were synthesized and characterized. Exemplary metals include hafnium, zirconium, tantalum, niobium, tungsten, molybdenum, tin and uranium. These compounds are volatile, highly stable thermally, and suitable for vapor deposition of metals and their oxides, nitrides and other compounds.
Inventors:
Gordon, Roy G.
A lane, Jean * Sebastian
Fuzzy, Lee
A lane, Jean * Sebastian
Fuzzy, Lee
Application Number:
JP2009518210A
Publication Date:
July 23, 2014
Filing Date:
June 26, 2007
Export Citation:
Assignee:
President And Fellows オブ Harbored College
International Classes:
C07C257/14; C07C395/00; C07F5/00; C07F7/00; C07F7/22; C07F9/00; C07F11/00; C23C16/18; C23C16/34; H01L21/316
Attorney, Agent or Firm:
Aoki 篤
Ishida 敬
Tetsuji Koga
Tomoyasu Nagasaka
Atsushi Ebiya
Yasuji Matsumoto
Ishida 敬
Tetsuji Koga
Tomoyasu Nagasaka
Atsushi Ebiya
Yasuji Matsumoto