Title:
構造化研磨物品、その製造方法、及びウエハの平坦化における使用
Document Type and Number:
Japanese Patent JP5351967
Kind Code:
B2
Abstract:
A structured abrasive article comprises an at least translucent film backing and an abrasive layer disposed on the backing. The abrasive layer comprises a plurality of shaped abrasive composites. The shaped abrasive composites comprise abrasive particles dispersed in a binder. The abrasive particles consist essentially of ceria particles having an average primary particle size of less than 100 nanometers. The binder comprises a polyether acid and a reaction product of components comprising a carboxylic(meth)acrylate and a poly(meth)acrylate, and, based on a total weight of the abrasive layer, the abrasive particles are present in an amount of at least 70 percent by weight. Methods of making and using the structured abrasive article are also disclosed.
Inventors:
Joseph, William, Dee.
Chiang, Julie, Wai.
Balun, Jimmy, Earl., Juniors
Gaghurardy, John, Jay.
Chiang, Julie, Wai.
Balun, Jimmy, Earl., Juniors
Gaghurardy, John, Jay.
Application Number:
JP2011525047A
Publication Date:
November 27, 2013
Filing Date:
July 30, 2009
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES COMPANY
International Classes:
B24B37/00; B24D3/02; B24B37/11; B24B53/00; B24D3/00; B24D3/28; B24D3/34; B24D7/06; H01L21/304
Domestic Patent References:
| JP2003534137A | ||||
| JP2005514217A | ||||
| JP2002254316A | ||||
| JP2007273910A | ||||
| JP2009539630A | ||||
| JP283172A | ||||
| JP200425445A |
Foreign References:
| WO2009128982A2 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Ikeda adult
Yoshinori Shimizu
Ikeda adult