Title:
VACUUM CABLE AND VACUUM PLASMA TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP3702206
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum cable and a vacuum plasma treatment device in which a plasma can be generated stably.
SOLUTION: This is provided with a center conductor 31 and an external conductor 32 to cover the center conductor 31, and the outer peripheral face is covered with a flexible tube 60. Further, this is provided with a metal plate (conducting means) 50 to make the external conductor 32 and a contact preventive plate 22 into an electrically contact, and with a fixing fittings to fix the metal plate 50 to electrically bring into a contact condition, and the metal plate 50 is fixed to the contact preventive plate 22 by means of bolts.
Inventors:
Shigekazu Ueno
Naoyuki Miyazono
Eishiro Sasakawa
Eiichiro Otsubo
Naoyuki Miyazono
Eishiro Sasakawa
Eiichiro Otsubo
Application Number:
JP2001260145A
Publication Date:
October 05, 2005
Filing Date:
August 29, 2001
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
H05H1/46; B01J3/00; B01J19/08; H01B7/17; H01L21/205; (IPC1-7): H05H1/46; B01J3/00; B01J19/08; H01L21/205
Domestic Patent References:
| JP2002093597A | ||||
| JP2000003878A | ||||
| JP7122502A | ||||
| JP6349594A | ||||
| JP6163186A | ||||
| JP2179869A |
Attorney, Agent or Firm:
Tadashi Takahashi
Masatake Shiga
Masakazu Aoyama
Masatake Shiga
Masakazu Aoyama